Implementing a Monte Carlo simulation for application to electron sample interactions requires use of accurate treatments of elastic and inelastic scattering. In formulating a Monte Carlo simulation, careful testing must be carried out to ensure that the calculation yields sensible and useful results. A suitable testing procedure includes calculation of (1) electron backscatter coefficients as a function of atomic number, including any necessary adjustment of scattering parameters; (2) backscatter coefficients as a function of specimen tilt; (3) backscatter and transmission coefficients for thin foils; (4) backscattered electron energy distributions; (5) electron spatial distributions; and (6) x-rays, including x-ray depth distributions, and relative and absolute yields.
Adapting a Monte Carlo simulation to a particular problem involving special sample geometry requires careful consideration of the interaction of the electron with the target. When the electron trajectory crosses a boundary, the segments of the trajectory in each phase must be calculated in a logical, stepwise fashion, allowing for modification of the step lengths due to variable scattering power in phases of different composition. The particular example of a planar boundary between phases of different composition is considered.
Newbury, Dale E. and Myklebust, Robert L.
"Monte Carlo Electron Trajectory Calculations of Electron Interactions in Samples with Special Geometries,"
Scanning Electron Microscopy: Vol. 1982
, Article 13.
Available at: https://digitalcommons.usu.edu/electron/vol1982/iss1/13