Scanning Electron Microscopy


The principal mechanisms and available data for the inelastic scattering of electrons in solids are reviewed. The processes relevant for electron-probe microanalysis, electron energy-loss spectroscopy, Auger-electron spectroscopy, and x-ray photoelectron spectroscopy are described and examples of relevant electron energy-loss data are shown. The discussion is based on the dielectric description of inelastic scattering and treats processes important in the excitation of both core electrons and valence electrons. Information is given on the cross sections for excitations of valence electrons, cross sections for ionization of core levels, inelastic mean free paths of Auger electrons and photoelectrons in solids, and radiation damage.

Included in

Biology Commons