Starting from a simple diffusion theory extended to oblique angles of incidence some empirical correction coefficients for electron backscattering have been found. These empirical coefficients have been used in calculations of backscattered electron surface density distribution, and good agreement with experimental data has been obtained.
Czarczyński, W. and Radzimski, Z.
"Some Applications of the Electron Backscattering Diffusion Model,"
Scanning Electron Microscopy: Vol. 1982
, Article 9.
Available at: https://digitalcommons.usu.edu/electron/vol1982/iss1/9