Surface Roughness Contribution to the Auger Electron Emission

Authors

D. Wehbi, École Nationale Supérieure de Mécanique et des Microtechniques
C. Roques-Carmes, École Nationale Supérieure de Mécanique et des Microtechniques

Abstract

Scanning Auger Microscopy (SAM) experiments have shown that z height and θ slope relative to the analysed spot are parameters that contribute to the measured Auger intensity I(z, θ). For greater analysed areas specific to Auger Electron Spectroscopy (AES), the knowledge of height and slope statistical distributions P(z) and P(θ) is required. These functions have been determined by means of profilometric data. The spatial resolution of the used tactile profilometer is similar to that which characterizes AES. A mathematical relationship I { P(z), P(θ) } has been set up for Si samples whose roughness is well defined. On the other hand, Auger images can be compared to level sections.

Recommended Citation

Wehbi, D. and Roques-Carmes, C. (1984) "Surface Roughness Contribution to the Auger Electron Emission," Scanning Electron Microscopy: Vol. 1985: No. 1, Article 17.
Available at: https://digitalcommons.usu.edu/electron/vol1985/iss1/17