Scanning Electron Microscopy


Scanning Auger Microscopy (SAM) experiments have shown that z height and θ slope relative to the analysed spot are parameters that contribute to the measured Auger intensity I(z, θ). For greater analysed areas specific to Auger Electron Spectroscopy (AES), the knowledge of height and slope statistical distributions P(z) and P(θ) is required. These functions have been determined by means of profilometric data. The spatial resolution of the used tactile profilometer is similar to that which characterizes AES. A mathematical relationship I { P(z), P(θ) } has been set up for Si samples whose roughness is well defined. On the other hand, Auger images can be compared to level sections.

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