Scanning Electron Microscopy


The ion microscope is an instrument which allows the study "in-situ" of polished solid surfaces by means of analysis of secondary ions emitted by the sample, this one being bombarded with neutral or ionized particles.

This instrument is a mass spectrometer and an ion microscope. It is then possible to study elements and their isotopes (mass spectra, counting, isotope abundances...) and to know the distribution of these elements in an area of around one hundred micrometers. Molecular and multicharged ions can be superimposed to elementary ions. Two methods can be used to suppress them but, in any case, it results in a lowering of secondary current. In spite of this disadvantage, the detection limit is at a level of a few ppm for cation elements. Matrix effect is studied in silicates where the influence of each element on the ionization probabilities has been determined.

We propose a method for quantitative elementary analysis in silicates taking the matrix effect into account.

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