Scanning Electron Microscopy


Non-destructive methods of inner object structure reconstruction in the scanning electron microscope (SEM) have been studied. For specimens with a size of about 1 mm a spatial resolution of 10 μm has been achieved. The reconstruction is made from a project ion in X-ray radiation. Algorithms of conventional computerized tomography are used. The application of 3-dimensional reconstruction to different types of microobjects has been shown. As an example, microtomography of organic objects (grass grain, beetle head) and inorganic objects (semiconductor diode) has been carried out.

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