Non-destructive methods of inner object structure reconstruction in the scanning electron microscope (SEM) have been studied. For specimens with a size of about 1 mm a spatial resolution of 10 μm has been achieved. The reconstruction is made from a project ion in X-ray radiation. Algorithms of conventional computerized tomography are used. The application of 3-dimensional reconstruction to different types of microobjects has been shown. As an example, microtomography of organic objects (grass grain, beetle head) and inorganic objects (semiconductor diode) has been carried out.
Sasov, A. Yu.
"Computerized Microtomography in Scanning Electron Microscopy,"
Scanning Electron Microscopy: Vol. 1985
, Article 21.
Available at: https://digitalcommons.usu.edu/electron/vol1985/iss3/21