Scanning Electron Microscopy


This paper reports on state-of-the-art developments in liquid metal sources and some of the finer points of their operating characteristics that are especially relevant to the satisfactory functioning of analytical ion scanning microscopes equipped with secondary ion mass spectrometers. Such effects include unwanted emissions from the source and their exclusion by means of filters and mass separators in the ion-optical column. The design of the ion-optical column is also discussed and some applications of this rapidly advancing form of analytical microscopy are described.

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