Scanning Electron Microscopy


Deconvolution calculations have been applied in Auger Electron Spectroscopy to increase resolution and/or to eliminate loss features. We present: i) A short review of the methodology; ii) Recent results obtained in our laboratory in spectroscopy of Al, Ni, Cu, Ag and Te; iii) A discussion on the conditions for the appearance of artefacts originating either in the calculation or the physical processes (emission anisotropy, distribution of electron path lengths, and intrinsic losses).

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