Deconvolution calculations have been applied in Auger Electron Spectroscopy to increase resolution and/or to eliminate loss features. We present: i) A short review of the methodology; ii) Recent results obtained in our laboratory in spectroscopy of Al, Ni, Cu, Ag and Te; iii) A discussion on the conditions for the appearance of artefacts originating either in the calculation or the physical processes (emission anisotropy, distribution of electron path lengths, and intrinsic losses).
Chornik, B.; Bishop, H. E.; Le Moel, A.; and Le Gressus, C.
"Deconvolution in Auger Electron Spectroscopy,"
Scanning Electron Microscopy: Vol. 1986
, Article 8.
Available at: https://digitalcommons.usu.edu/electron/vol1986/iss1/8