Scanning Electron Microscopy


Highly corrected electron-beam blanking systems (EBBS) are required for analyzing fast periodic processes at submicron spatial resolutions by stroboscopic methods. The deleterious degradation of the probe during the blanking operation can be avoided by a new straight-vision deflection system. Chopping of the beam is performed within this system by deflecting it across a knife edge. Calculations demonstrate that this system should be able to generate almost rectangular beam pulses with rise times of a few picoseconds and spot sizes smaller than 0.5 µm. The proposed EBBS consists of two wedge-shaped plate capacitors located symmetrically about the midplane of a rotationally symmetric double lens. Time-of-flight effects are largely compensated by driving the two capacitors as a traveling-wave structure to yield resonance deflection.

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