Scanning Microscopy


An ultra high resolution scanning electron microscope, which is composed of a cold cathode field emission gun and an in-lens system for specimens, has been developed. Probe size is estimated 0.8nm at 30kV by calculation and confirmed experimentally using high atomic number samples such as fine Pt particles sputter-coated on carbon. Three stage ion pumps for the column and a turbo molecular pump for the specimen chamber have been used for a totally dry vacuum system. Applications for fine metal oxide particles and biological samples observed directly without any metal coating, and applications chosen especially to show lower voltage performance, are shown.

Included in

Life Sciences Commons