A new approach of plasma processes of industrial use is presented, with emphasis on the chemical properties of the plasma gas. Reactions occurring at the gas/target interface are for the first time interpreted in terms of acid-base reactions and pertinent examples are given of laboratory experiments and of industrial treatments (e. g., etching, plasma polymerization or surface modification processes). Proton exchanges between the plasma phase and an aqueous target gives evidence of Bronsted acid-base phenomena. Illustrations of Lewis acid-base characters are provided by the role of biradicals (e.g., halogenocarbenes, nitrenc) which are the main reacting species in etching or in surface treatment processes.
Amouroux, J.; Brisset, J. L.; Doubla, A.; Gicquel, A.; Goldman, A.; and Rouzbehi, F.
"Interactions Between a Condensed Target and a Non-Equilibrium Plasma: Acid-Base Reactions at the Interface,"
Scanning Microscopy: Vol. 1
, Article 10.
Available at: https://digitalcommons.usu.edu/microscopy/vol1/iss4/10