Scanning Microscopy


In conventional e-beam testers the potential of a device under test is measured by collecting the secondary electrons (SE's) faster than a certain limit, while the slower SE's are rejected. We have built an e-beam tester in which the slower SE's are also collected. In this paper we will show that this can decrease the minimum measurable voltage substantially. An additional advantage of a double channel analyser is the possible reduction of the influence of fluctuations in the primary beam and in the secondary emission coefficient.

Included in

Biology Commons