A primary beam impinging on a solid target suffers elastic and inelastic collisions with the components of the solid. These collisions can be incorporated into a Monte-Carlo simulation model if all the cross sections associated with the various types of collisions are known.
Elastic diffusion effects are mainly related to the interactions of the particles with the real potential V(r) surrounding each ionic core. An essential simplification of the inelastic interactions is to consider that the solid reacts as a whole to an external probe, which is the incident electron beam. The linear response of the solid to an external perturbation is described by its dielectric function.
In the present paper, the methods used to evaluate the elastic and inelastic cross-sections and to simulate the secondary electron emission are reviewed and discussed.
Cailler, Michel and Ganachaud, Jean-Pierre
"Secondary Electron Emission from Solids. II. Theoretical Descriptions,"
Scanning Microscopy: Vol. 1990
, Article 7.
Available at: https://digitalcommons.usu.edu/microscopy/vol1990/iss4/7