Scanning Microscopy


Synchrotron radiation induced X-ray micro fluorescence analysis (μ-SRXRF) is compared with more conventional microanalytical techniques such as secondary ion microscopy (SIMS) and electron probe X-ray microanalysis (EPXMA) for two typical microanalytical applications. μ-SRXRF and EPXMA are employed for the analysis of individual particles, showing the complementary character of both techniques. By means of element mapping of trace constituents in a heterogeneous feldspar material, the strong and weak points of μ-SRXRF in comparison to EPXMA and SIMS are illustrated. The most striking difference between μ-SRXRF and the other two microanalytical methods is the ability of SRXRF to probe deep into the investigated material, whereas SIMS and EPXMA only investigate the upper surface of the material. The possibilities of μ-SRXRF using radiation from bending magnets of third generation synchrotron rings are briefly discussed. μ-SRXRF is considered to be a valuable method for the analysis of major, minor and trace elements which can be used profitably m parallel with electron-and ion-beam methods.

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