Scanning Microscopy


We have derived the energy loss function of Au for 1 keV electrons by Monte Carlo analysis of the reflection electron energy loss spectroscopy (REELS) spectra. This energy loss function was significantly different from the optical loss function widely used and has revealed that the surface excitation affects the energy loss spectrum of keV electrons.

X-ray photoelectron spectroscopy (XPS) background subtraction has been recently developed by using the energy loss function derived from the transmission electron energy loss spectroscopy (TEELS). We have demonstrated that the energy loss function derived from REELS has enabled a more accurate Au 4f XPS spectrum to be obtained after subtraction of the inelastic background.

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