Scanning Microscopy


In the present work the experimental features of secondary electron emission from solids are considered in view of the standard semiempirical theory as well as recent transport theory based on similar principles as sputtering theory. Electron as well as proton-induced secondary electron emission are included. The yield, the energy distribution and angular distribution of the secondaries, and the contribution from reflected electrons are compared with the predictions of the theories. The deficiencies in the semiempirical theory are discussed. The results of the transport theory depend on the dominant production mechanism for the internal secondaries, cascade multiplication or primary ionization only. In both cases the predictions of the theory show a fair agreement with the experimental results. Discrepancies between the experimental data and the theoretical results are discussed. The considerations demonstrate that there is no simple yield dependence on the atomic number.

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