Scanning Microscopy


For the study of ion scattering from solid surface, it is required that the energy of ions can be adjusted widely. The constrained optimization design of an ion focusing system with wide energy range and the magnification less than unity using the improved complex method is proposed in the present paper. This ion focusing system is suitable for use in the low energy ion scattering spectroscopy (ISS) and secondary ion mass spectroscopy (SIMS).

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