Scanning Microscopy


The paper presents a detailed analysis of Electron Beam Induced Current (EBIC) diffusion-length and contrast data for samples containing defect accumulations. The formulae given allow one to estimate to which extent the average diffusion length is determined by recombination-active defects showing EBIC contrast.

This analysis may be used to identify essential sources of bulk recombination in annealed silicon. In the light of our results stacking faults are an essential source of bulk recombination in intrinsically gettered p-type Cz silicon.

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