Scanning Near Field Optical Microscopy (SNOM) in Reflection or Scanning Optical Tunneling Microscopy (SOTM)

Authors

U. Ch. Fischer, Ernst Leitz Wetzlar GmbH
U. T. Dürig, IBM Zürich Research Laboratory
D. W. Pohl, IBM Zürich Research Laboratory

Abstract

The recent exploitation of near field optics opened a new branch of light microscopy beyond the diffraction limit. With scanning near field optical microscopy a lateral resolution of 20 and 50 nm was obtained in transmission and reflection, respectively. In a novel optical tunneling mode, also the topography of pure phase objects has been imaged at a resolution of 50 nm laterally and 1 nm vertically.

Recommended Citation

Fischer, U. Ch.; Dürig, U. T.; and Pohl, D. W. (1989) "Scanning Near Field Optical Microscopy (SNOM) in Reflection or Scanning Optical Tunneling Microscopy (SOTM)," Scanning Microscopy: Vol. 3: No. 1, Article 1.
Available at: https://digitalcommons.usu.edu/microscopy/vol3/iss1/1