Inspection of Single-Point Diamond Turning Tools at Low Accelerating Voltage in a Scanning Electron Microscope

Authors

Michael T. Postek, National Institute of Standards and Technology
Christopher J. Evans, University of Wisconsin

Abstract

Single crystal diamond tools used in the machining process have been inspected in both the optical microscope and scanning electron microscope. Attention was focused on surface characteristics related to the specific polishing process and its relationship to cutting-edge structure. The need for tool inspection is discussed as well as the drawbacks with the inspection techniques presently used. Low accelerating voltage ( < 2.5 keV) inspection of uncoated diamond tools for machining is shown to be a viable method for the determination of polishing flaws that grossly reflect in the surface quality of the finished part.

Recommended Citation

Postek, Michael T. and Evans, Christopher J. (1989) "Inspection of Single-Point Diamond Turning Tools at Low Accelerating Voltage in a Scanning Electron Microscope," Scanning Microscopy: Vol. 3: No. 2, Article 5.
Available at: https://digitalcommons.usu.edu/microscopy/vol3/iss2/5