Scanning Microscopy


A review is given of the application of high energy elastic backscattering spectrometry techniques for profiling high-temperature superconducting (HTSC) materials in thin film form. The use of higher bombarding ion energies provides most of the advantages of the more common lower energy or Rutherford backscattering (RBS) but additionally allows profiling to a greater thickness and, by a much larger sensitivity for light elements, permits profiling carbon and oxygen in the presence of heavier substrates. Examples for HTSC materials are given.

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