The interaction of an electron beam with a solid can be modeled by the so-called Monte Carlo method. This technique produces a stepwise simulation of the electron trajectory by using random numbers to predict scattering angles on the basis of theoretical probability distributions or empirical models. The physical basis of electron scattering in a solid is described and two generic types of Monte Carlo model are then developed together with suggested examples of their application. An IBM PC compatible disc containing these programs is available from the author.
Joy, David C.
"An Introduction to Monte Carlo Simulations,"
Scanning Microscopy: Vol. 5
, Article 4.
Available at: https://digitalcommons.usu.edu/microscopy/vol5/iss2/4