Scanning Microscopy


Ion Microtomography (IMT) provides quantitative, fine resolution density imaging of samples for materials characterization. Reconstructed tomographic images are obtained by application of a filtered backprojection algorithm to the collected data. The attainable resolution and data acquisition rate are affected by several parameters. These include the number of ions measured per spot, using either the mean or median residual energy, utilizing Bragg additivity, changing the number of rays or the number of projections and oversampling the data. A tomography simulation computer program is described and used to study the contributions from these effects on the numerical reconstruction of an array of silicon pillars.

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