Scanning Microscopy


This work outlines the development of a comprehensive theory for the electron probe microanalyser and scanning electron microscope or SEM, that is intended to serve as a framework of understanding for those employing electron beam methods and as a basis for improved correction procedures. There is particular emphasis on applications to layered and non-uniform specimens. Starting from a simple Gaussian depth distribution of electrons and making assumptions about the X-ray production, a series of predictions of X-ray and electron signals are made for various target configurations. When compared with experimental measurements a series of interesting discoveries follow, which, taken altogether, lead to a more refined model with the promise of more accurate analyses and a better understanding of the physics involved.

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