Electron Beam Induced Capacitance

Authors

O. V. Kononchuk, Academy of Sciences of the USSR
Eu. B. Yakimov, Academy of Sciences of the USSR

Abstract

A model of signal formation in the Electron Beam Induced Capacitance (EBICap) mode of the Scanning Electron Microscopy (SEM) is proposed. In the frame of this model the possibilities of this technique are analyzed. It is shown that EBICap is suitable to obtain a local depletion region width and for mapping of this parameter. Experimental results demonstrating the potentialities of EBICap are presented.

Recommended Citation

Kononchuk, O. V. and Yakimov, Eu. B. (1992) "Electron Beam Induced Capacitance," Scanning Microscopy: Vol. 6: No. 2, Article 8.
Available at: https://digitalcommons.usu.edu/microscopy/vol6/iss2/8