A model of signal formation in the Electron Beam Induced Capacitance (EBICap) mode of the Scanning Electron Microscopy (SEM) is proposed. In the frame of this model the possibilities of this technique are analyzed. It is shown that EBICap is suitable to obtain a local depletion region width and for mapping of this parameter. Experimental results demonstrating the potentialities of EBICap are presented.
Kononchuk, O. V. and Yakimov, Eu. B.
"Electron Beam Induced Capacitance,"
Scanning Microscopy: Vol. 6
, Article 8.
Available at: https://digitalcommons.usu.edu/microscopy/vol6/iss2/8