The Scanning Probe Microscope

Authors

J. Jahanmir, WYKO Corporation
B. G. Haggar, WYKO Corporation
J. B. Hayes, WYKO Corporation

Abstract

Scanning probe microscopy bas evolved into a powerful tool since its inception in 1982. The scanning probe microscope bas found applications in metrology, spectroscopy, and lithography. We will review the background of the technology, discuss the different types of scanning probe microscopes including the scanning tunneling microscope and the scanning force microscope, and present many of the applications for the instrument.

Recommended Citation

Jahanmir, J.; Haggar, B. G.; and Hayes, J. B. (1992) "The Scanning Probe Microscope," Scanning Microscopy: Vol. 6: No. 3, Article 2.
Available at: https://digitalcommons.usu.edu/microscopy/vol6/iss3/2