We have developed and characterized a time-resolved scanning electron microscopy (SEM) operational mode which provides non-destructive mechanical characterization of nanodynamical structures with 8-bit image resolution and 200 ns time resolution. This time-resolved SEM scheme does not require blanking plates, nor does it require any hardware modification to a commercially available scanning electron microscope. Both time-resolved images and line scan profiles of nanofabricated single crystal silicon tweezers are obtained. This time-resolved SEM operational mode can be used to evaluate a number of important mechanical properties of nanodynamical structures, including time response and resonance mode-shapes.
Yao, J. Jason and MacDonald, Noel C.
"Time-Resolved Scanning Electron Microscopy Analysis of Nanodynamical Structures,"
Scanning Microscopy: Vol. 6
, Article 5.
Available at: https://digitalcommons.usu.edu/microscopy/vol6/iss4/5