Scanning Microscopy


Quantitative and structural elemental information is available from the nuclear microprobe through a time consuming fit of the (X-ray) spectrum at each point. An alternative technique is proposed which greatly shortens the analysis procedure and allows an increased number of samples to be processed. The method discussed here is to create elemental maps which, when they are divided by the charge/pixel and multiplied by a scaling factor, will form quantitative maps. The scaling factors are obtained from a calibration procedure comparing a large number of fitted X-ray spectra with the corresponding contents of selected energy windows. The technique also allows the reduction of artefacts due to spectral overlap, assuming that a simple background model can be used.

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