Scanning Microscopy


Recently, the first results of electron beam induced current (EBIC) measurements in a scanning tunneling microscope (STM) have been reported. Although the acquired results match with those obtained in conventional EBIC investigations, the interpretation of the obtained results is still restricted solely to a qualitative discussion. In this paper, a quantitative approach is used for two-dimensional numerical simulations of induced currents in GaAs-MESFET leading to a first starting point for a sophisticated interpretation of the dependence of induced currents on experimental and device parameters.

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