All Physics Faculty Publications
The role of antiphase boundaries during ion sputtering and solid phase epitaxy of Si(001)
Document Type
Article
Journal/Book Title/Conference
Surface Science
Issue
538
Publication Date
2003
Abstract
The Si(0 0 1) surface morphology during ion sputtering at elevated temperatures and solid phase epitaxy (SPE) following ion sputtering at room temperature has been investigated using scanning tunneling microscopy. Two types of antiphase boundaries form on Si(0 0 1) surfaces during ion sputtering and SPE. One type of antiphase boundary, the AP2 antiphase boundary, contributes to the surface roughening. AP2 antiphase boundaries are stable up to 700 °C, and ion sputtering and SPE performed at 700 °C result in atomically flat Si(0 0 1) surfaces.
Recommended Citation
J. C. Kim, J.-Y. Ji, J. S. Kline, J. R. Tucker, and T.-C. Shen, “The role of antiphase boundaries during ion sputtering and solid phase epitaxy of Si(001),” Surf. Sci. 538, L471 (2003).
https://doi.org/10.1016/S0039-6028(03)00730-1