
All Physics Faculty Publications
Title
Metal silicide patterning: a new approach to silicon nanoelectronics
Document Type
Article
Journal/Book Title/Conference
Nanotechnology
Issue
7
Publication Date
1996
First Page
275
Recommended Citation
J. R. Tucker, C. Wang and T.-C. Shen,"Metal silicide patterning: a new approach to silicon nanoelectronics," Nanotechnology 7, 275 (1996).