Detection System for Scanning Electron Microscope

Authors

J. Hejna, Technical University of Wroclaw, Poland
Z. Radzimski, Technical University of Wroclaw, Poland
A. Buczkowski, Technical University of Wroclaw, Poland

Abstract

The kind of information and the quality of the backscattered electron (BSE) images depend upon numerous features of the detector. Therefore, various types of detectors should be used simultaneously to obtain as much of information as possible. The detection system presented here contains a large area semiconductor detector and a BSE to secondary electrons (SE) converter system. These two different kinds of detectors give different BSE images. After subtracting the signal of a semiconductor detector from that of a converter system, an image with good topography and reduced material contrast can be achieved.

Recommended Citation

Hejna, J.; Radzimski, Z.; and Buczkowski, A. (1984) "Detection System for Scanning Electron Microscope," Scanning Electron Microscopy: Vol. 1985: No. 1, Article 14.
Available at: https://digitalcommons.usu.edu/electron/vol1985/iss1/14