Oxidation of Aluminum Studied by Ion Scattering Spectroscopy (I.S.S) in a Scanning Auger Microscope

Authors

M. Gautier, C.E.N. Saclay
J. P. Duraud, C.E.N. Saclay
J. P. Vigouroux, C.E.N. Saclay
C. Le Gressus, C.E.N. Saclay
R. Shimizu, Osaka University

Abstract

The set up of an ion gun, producing a focused beam in the analysis chamber of a Scanning Auger Microscope permits ion scattering experiments: surface studies performed by electron spectroscopies can then be enlarged by Ion Scattering Spectroscopy (I.S.S.) to get additional information.

I.S.S. appears to be very sensitive to the cleanliness of the surface: comparison between Electron Energy Loss Spectroscopy (E.E.L.S.) and I.S.S. studies on clean samples show that I.S.S. can still detect oxygen even when it is not detectable by E.E.L.S.

Preliminary results on oxidation of Al (111) and Al (100) give oxidation curves in good agreement with those obtained by Auger Electron Spectroscopy (A.E.S.) and X Ray Photoemission Spectroscopy (X.P.S.).

Recommended Citation

Gautier, M.; Duraud, J. P.; Vigouroux, J. P.; Le Gressus, C.; and Shimizu, R. (1984) "Oxidation of Aluminum Studied by Ion Scattering Spectroscopy (I.S.S) in a Scanning Auger Microscope," Scanning Electron Microscopy: Vol. 1985: No. 1, Article 16.
Available at: https://digitalcommons.usu.edu/electron/vol1985/iss1/16