Advances in Non-Contact Thermal-Wave Imaging with Infrared Detection

Authors

F. H. Dacol, IMB T.J. Watson Research Center
H. Ermert, Universität Erlangen-Nürnberg
R. L. Melcher, IBM T.J. Watson Research Center

Abstract

We are making further advances in non-destructive and non-contact thermal imaging with infrared detection. We employ a chopped and scanned electron beam as heat source, a cooled HgCdTe infrared detector as temperature sensor, and digital processing of the measured temperature pattern for display and storage. The results give a convincing, high contrast image of subsurface structures.

Recommended Citation

Dacol, F. H.; Ermert, H.; and Melcher, R. L. (1984) "Advances in Non-Contact Thermal-Wave Imaging with Infrared Detection," Scanning Electron Microscopy: Vol. 1985: No. 2, Article 14.
Available at: https://digitalcommons.usu.edu/electron/vol1985/iss2/14