Limits of Quantitative Microanalysis Using Secondary Ion Mass Spectrometry

Authors

Peter Williams, Arizona State University

Abstract

The limitations on secondary ion micro-analytical performance imposed by ionization probabilities, mass spectrometer transmission, requirements for standards and sputtering artifacts have been investigated. The sensitivity of a modern magnetic mass spectrometer for sputtered B⁺ from oxidized Si is ~ 10^-2 ions detected/atom sputtered. For this sensitivity, it is shown that ion microscopy of a part-per-million impurity is limited in lateral resolution to ~ 1 μm. For a 1% impurity, lateral resolution of ~ 30 nm is achievable. Depth profile analysis at the ppm level requires sample areas ~ 10 μm². Isotope abundance determinations in volumes ~ 1 μm³ require the concentration of the least-abundant isotope to be > 1%.

Recommended Citation

Williams, Peter (1985) "Limits of Quantitative Microanalysis Using Secondary Ion Mass Spectrometry," Scanning Electron Microscopy: Vol. 1985: No. 2, Article 7.
Available at: https://digitalcommons.usu.edu/electron/vol1985/iss2/7