Scanning Electron Microscopy


The interaction of keV particles with solids has been characterized by the measurement of the angle and energy distribution of sputtered secondary ions and neutrals. The results are compared to classical dynamics calculations of the ion impact event. Examples using secondary ions are given for clean Ni{001}, Cu{001} reacted with O2, Ni{001} and Ni{7 9 11) reacted with CO, and Ag{111} reacted with benzene. The neutral Rh atoms desorbed from Rh{001} are characterized by multiphoton resonance ionizaton of these atoms after they have left the surface.

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