Scanning Electron Microscopy


The scanning acoustic microscopy is a powerful tool for subsurface imaging and therefore fault detection in coated parts. In this paper several methods are established to reveal the imaging of hidden structures. First efforts were made to find out the information depth due to the various distances between lens and surface of the object. By means of a specially developed test specimen it was possible to estimate the penetration depth for monitoring structural details. The indepth analysis of layered composites is considered by the determination of the V(z)-characteristics. Furthermore the gain of image processing by means of Fourier transformed patterns and simultaneous filtering is shown by a typical example.

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