A Dynamic Single E-Beam Short/Open Testing Technique

Authors

M. Brunner, Research Laboratories of Siemens
B. Lischke, Research Laboratories of Siemens

Abstract

Several electron beam techniques for electrical testing of interconnection modules have been presented by different authors in recent years. Most techniques use two or more electron beam energies to establish a charging and a non-loading reading mode. The present paper discusses the feasibility of employing the same beam energy for charging contact pads and reading pad potentials. This avoids the necessity of high voltage switching as used for altering the beam energy. A switching time of 100 us between 2 kV and 4 kV beam voltage which is restricted to this range has been reported earlier. Without switching, higher beam energies may be used with smaller transition times between charging and reading of the test pads.

Recommended Citation

Brunner, M. and Lischke, B. (1985) "A Dynamic Single E-Beam Short/Open Testing Technique," Scanning Electron Microscopy: Vol. 1985: No. 3, Article 9.
Available at: https://digitalcommons.usu.edu/electron/vol1985/iss3/9