Analytical Ultra High Vacuum Scanning Electron Microscopy with Field Emission Gun for Surface Study

Authors

P. Morin, Université Lyon I
P. Abraham, Université Lyon I
C. Bablet, Université Lyon I
M. Tholomier, Université Lyon I

Abstract

Surface studies can be carried out with a scanning electron microscope (SEM) having an ultra high vacuum specimen chamber. The main application of this SEM was the micro Auger analysis, but it is also interesting to combine the usual surface study technique with SEM observations. Indeed, these latter give valuable in formation about the topographic, chemical and crystallographic aspects of the surface when the secondary, backscattered and transmission SEM modes are used. The SEM performances are increased by the use of a field emission gun, the high brightness beam of this gun gives new observation possibilities such as the imaging of crystallographic defects on solid samples.

Recommended Citation

Morin, P.; Abraham, P.; Bablet, C.; and Tholomier, M. (1986) "Analytical Ultra High Vacuum Scanning Electron Microscopy with Field Emission Gun for Surface Study," Scanning Electron Microscopy: Vol. 1986: No. 1, Article 1.
Available at: https://digitalcommons.usu.edu/electron/vol1986/iss1/1