Deconvolution in Auger Electron Spectroscopy

Authors

B. Chornik, Universidad Simon Bolivar
H. E. Bishop, AERE Harwell
A. Le Moel, CEA-CEN Saclay
C. Le Gressus, CEA-CEN Saclay

Abstract

Deconvolution calculations have been applied in Auger Electron Spectroscopy to increase resolution and/or to eliminate loss features. We present: i) A short review of the methodology; ii) Recent results obtained in our laboratory in spectroscopy of Al, Ni, Cu, Ag and Te; iii) A discussion on the conditions for the appearance of artefacts originating either in the calculation or the physical processes (emission anisotropy, distribution of electron path lengths, and intrinsic losses).

Recommended Citation

Chornik, B.; Bishop, H. E.; Le Moel, A.; and Le Gressus, C. (1986) "Deconvolution in Auger Electron Spectroscopy," Scanning Electron Microscopy: Vol. 1986: No. 1, Article 8.
Available at: https://digitalcommons.usu.edu/electron/vol1986/iss1/8