Physical Basis for Spectrometer Calibration

Authors

M. Gautier, Centre d'Etudes Nucleaires de Saclay
J. P. Duraud, Centre d'Etudes Nucleaires de Saclay
J. P. Vigouroux, Centre d'Etudes Nucleaires de Saclay
C. Le Gressus, Centre d'Etudes Nucleaires de Saclay

Abstract

Progress in quantitative surface analysis is hampered by the lack of experimental procedure including spectrometer calibration, sample preparation, and general experimental setting-up. Two methods for spectrometer alignment are compared: the linearization method and the elastic peak test. Experimental spectra are presented, which can be considered as stringent reference data to check the instrument response and the analyser transmission at low energies.

Recommended Citation

Gautier, M.; Duraud, J. P.; Vigouroux, J. P.; and Le Gressus, C. (1986) "Physical Basis for Spectrometer Calibration," Scanning Electron Microscopy: Vol. 1986: No. 1, Article 9.
Available at: https://digitalcommons.usu.edu/electron/vol1986/iss1/9