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Scanning Electron Microscopy

Abstract

Quantitative multielement microanalyses of insulators and refractory materials are made with an advanced laser microprobe mass spectrometer (LPMS-2S). A plasma in local thermal equilibrium (LTE) is generated in a field-free region in the ion source by a short laser pulse. A magnetic time-of-flight (TOF) mass analyzer is used to optimize ion transmission and mass separation. And, an Eloy-Unsold wide aperture ion detector provides the low noise and wide dynamic range required for accurate analyses. The characteristics of the LPMS-2S are demonstrated with NBS standard reference glasses and are compared with the characteristics of the commercially available LAMMA and LIMA microprobe mass spectrometers.

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