A New Surface Analytical Technique with Ion and Laser Beams

Authors

Christopher H. Becker, SRI International

Abstract

This paper reviews recent results and developments, while presenting some new information, regarding the development of a novel surface analytical technique that uses nonresonant multiphoton ionization (MPI) of neutral atoms and molecules sputtered by an ion beam, or desorbed by an electron or second laser beam or by thermal means. In this method, called surface analysis by laser ionization (SALI), the nonresonant MPI, or "laser ionization," is coupled with state-of-the-art time-of-flight mass spectrometry to provide extremely sensitive, general, and readily quantifiable surface analysis. A discussion also describes the favorable prospects for implementation of SALI with submicron dimension liquid metal ion beams for microanalysis, including situations with electron beam sensitive samples.

Recommended Citation

Becker, Christopher H. (1986) "A New Surface Analytical Technique with Ion and Laser Beams," Scanning Electron Microscopy: Vol. 1986: No. 4, Article 3.
Available at: https://digitalcommons.usu.edu/electron/vol1986/iss4/3