A Comparison of Lanthanum Hexaboride, Cold FIeld Emission and Thermal Field Emission Electron Guns for Low Voltage Scanning Electron Microscopy

Authors

J. Orloff, Oregon Graduate Center

Abstract

A comparison of lanthanum hexaboride, cold W(310) field emission and Zr/W thermal field emission cathodes was made by calculating the current-spot size relationship for each, using comparable lenses, to determine which would be suitable for high current operation at 1 keV beam energy, with a focused beam diameter < 0.05 μm. On the criteria of highest current, reasonable operating conditions for the gun for low noise operation and long term cathode stability it was found that the lanthanum hexaboride and cold field emission cathodes are inadequate or marginal and that the best performance is obtainable from the thermal field emission cathode.

Recommended Citation

Orloff, J. (1984) "A Comparison of Lanthanum Hexaboride, Cold FIeld Emission and Thermal Field Emission Electron Guns for Low Voltage Scanning Electron Microscopy," Scanning Electron Microscopy: Vol. 3: No. 1, Article 15.
Available at: https://digitalcommons.usu.edu/electron/vol3/iss1/15