Electron Detectors Used for Imaging in the Scanning Electron Microscope

Authors

V. N. E. Robinson, The University of New South Wales

Abstract

Electron detectors used for imaging in the scanning electron microscope include those which detect secondary electrons, various portions of the backscattered electron signal, and the residual specimen current. The use of a different detector will often produce a different image of the same specimen. The information contained in these images depends upon the signal detected and the properties of the detector used. The choice of detector to be used depends upon the information desired.

Recommended Citation

Robinson, V. N. E. (1984) "Electron Detectors Used for Imaging in the Scanning Electron Microscope," Scanning Electron Microscopy: Vol. 3: No. 1, Article 19.
Available at: https://digitalcommons.usu.edu/electron/vol3/iss1/19