Scanning Electron Microscopy
Abstract
The need for a specialized detector for low beam voltage and low beam current applications has led to the investigation of a microchannel plate detector for SEM. The application requirements are described in detail, with the case of integrated circuit metrology used as an example. The microchannel plate (MCP) detector has proven to meet almost all of the design objectives of a low voltage metrology SEM detector. The symmetry of the detector and the ability to mount it directly to the final pole piece are among the most important features.
Recommended Citation
Russell, P. E.
(1984)
"Microchannel Plates as Specialized Scanning Electron Microscopy Detectors,"
Scanning Electron Microscopy: Vol. 3:
No.
1, Article 20.
Available at:
https://digitalcommons.usu.edu/electron/vol3/iss1/20