Scanning Microscopy


Solid state detectors (SSD) are the most commonly used backscattered electron (BSE) detectors in scanning electron microscopy (SEM). They have been used for at least 20 years and many types are described in the literature. These detectors can be designed in many shapes and forms but in commercially available SEMs two semiconductor detectors (A and B) are usually placed below the polepiece where they are used for compositional (A+B) and topographic (A-B) contrast enhancement. The range of SSD applications available from BSE is quite extensive. The kind and quality of information depend strongly on the shape and position of the detector in relation to the specimen and the electron beam. Also very important is the current gain vs. electron energy dependence, which can be controlled by detector manufacturing technology. This paper reviews various possible applications of semiconductor detectors in SEM, as well as factors which influence the quality of information obtainable from BSE by semiconductor detectors.

Included in

Life Sciences Commons