A Ring Scintillation Detector for Detection of Backscattered Electrons in the Scanning Electron Microscope

Authors

J. Hejna, Technical University of Wrocław

Abstract

A backscattered electron detector with a cylindrical detecting surface has been constructed and installed in a scanning electron microscope. The detector surrounds the specimen and accepts electrons emitted into a specific range of zenith angles. In the case of untilted specimens it collects electrons emerging from the specimen surface at low exit angles relating to it. This enables us to obtain a good resolution of images of untilted specimens. Moreover, the detect or gives very high level of topographic contrast and good three-dimensional impression of the specimen shape.

Recommended Citation

Hejna, J. (1987) "A Ring Scintillation Detector for Detection of Backscattered Electrons in the Scanning Electron Microscope," Scanning Microscopy: Vol. 1: No. 3, Article 12.
Available at: https://digitalcommons.usu.edu/microscopy/vol1/iss3/12