Development of an Ultra High Resolution Scanning Electron Microscope by Means of a Field Emission Source and In-Lens System

Authors

Takashi Nagatani, Hitachi Ltd.
Shoubu Saito, Hitachi Ltd.
Mitsugu Sato, Hitachi Ltd.
Mitsuhiko Yamada, Hitachi Ltd.

Abstract

An ultra high resolution scanning electron microscope, which is composed of a cold cathode field emission gun and an in-lens system for specimens, has been developed. Probe size is estimated 0.8nm at 30kV by calculation and confirmed experimentally using high atomic number samples such as fine Pt particles sputter-coated on carbon. Three stage ion pumps for the column and a turbo molecular pump for the specimen chamber have been used for a totally dry vacuum system. Applications for fine metal oxide particles and biological samples observed directly without any metal coating, and applications chosen especially to show lower voltage performance, are shown.

Recommended Citation

Nagatani, Takashi; Saito, Shoubu; Sato, Mitsugu; and Yamada, Mitsuhiko (1987) "Development of an Ultra High Resolution Scanning Electron Microscope by Means of a Field Emission Source and In-Lens System," Scanning Microscopy: Vol. 1: No. 3, Article 3.
Available at: https://digitalcommons.usu.edu/microscopy/vol1/iss3/3