Optical Emission and Laser Spectroscopy in Studies of Sputtering: Actual Research Activities and Recent Achievements

Authors

W. Husinsky, Technische Universität Wien
G. Betz, Technische Universität Wien

Abstract

Laser Spectroscopy has been developed into a powerful tool for the detection and energy analysis of neutral particles. Laser Induced Fluorescence Spectroscopy (LIF) has yielded a wealth of information about sputtered neutral particles. In addition, Laser Ionization Spectroscopy has recently offered an increased detection sensitivity. In this paper a summary of recent results is given. By combining LIF with other methods capable of measuring densities and energy distributions of sputtered excited atoms in short lived states, new information about sputtering and excitation mechanisms have been recently obtained and will be summarized here.

Recommended Citation

Husinsky, W. and Betz, G. (1987) "Optical Emission and Laser Spectroscopy in Studies of Sputtering: Actual Research Activities and Recent Achievements," Scanning Microscopy: Vol. 1: No. 4, Article 12.
Available at: https://digitalcommons.usu.edu/microscopy/vol1/iss4/12